MEME Thermoelectric Chip

Micro/nano Thermoelectric Technology

Microelectromechanical energy (MEME) thermoelectric chips achieve efficient energy conversion through innovative nanostructured materials and micro-nanoelectromechanical system design. They can provide sustainable green energy solutions for scenarios such as industrial waste heat power generation, environmental thermal energy utilization, IoT devices, wearable products, and industrial sensors.

Innovations in theory, equipment, material, fabrication and applications

Theoretical Innovation: Scale Effects of Heat

Nano-structuring: High-Efficiency Thermoelectric Materials

Micro/Nano-Fabrication: Large-Scale Production

Technological Breakthrough: Micro-Thermoelectric Power Generation

Precision Sensing: Next-Generation Sensors

Green Energy: The Micro-Nano Energy Revolution

MEME Thermoelectric Chip Product Image

Technology

  • Seebeck effect:
  • Peltier effect:
  • Scale Effects of Heat:

The MEME Thermoelectric Chip combines thermoelectric effects with nanoscale engineering. Tens of thousands of thermoelectric pairs are integrated on a single chip, enabling efficient energy conversion even from tiny temperature differences.

  • Seebeck effect: Converts temperature gradients into electrical power.
  • Peltier effect: Generates localized heating or cooling at the chip level.
  • Scale Effects of Heat: In nanostructures, scale effects enable partial decoupling of thermal and electrical transport, thereby reducing thermal conductivity while enhancing the power factor.

MEME chips, featuring ultra-high sensitivity, low energy consumption, and seamless integrability, are emerging as a core technology for next-generation energy, sensing, and thermal management applications.

Core Technology Diagram

International Recognition

R&D 100 Award Image

2024 R&D 100 Sustainability Innovator of the Year (Known as the "Oscars" of technological innovation)

Silicon Valley Invention Festival Gold Award Image

Gold Medal, the 2024 Silicon Valley Innovation and Invention Festival, USA

Geneva International Exhibition of Inventions Silver Award Image

Silver Medal, the 49th Salon International des Inventions de Genève, Switzerland

Applications

It can be bonded with CMOS chips to achieve 600K/mm chip-level cooling, effectively reducing the chip hotspot temperature.

Chip-level cooling application

Planar array high-precision temperature difference sensor: 0.001K sensitivity.

High-precision sensing application 1

Temperature sensors used in high-end analytical and testing equipment

High-precision sensing application 2

Identifying colors and materials

High-precision sensing application 3

Quantitative measurement of images and sounds

High-precision sensing application 4

Wearable sensors for humans and robots

High-efficiency small temperature difference power generation breaks the bottleneck of low-grade thermal energy utilization and realizes efficient conversion of thermal energy into green energy in all scenarios.

Micro-power generation application 1
Micro-power generation application 2

Contact Us

We look forward to collaborating with you to explore the infinite possibilities of thermoelectric conversion.

metaet2025@metaenergytech.com

Please contact us via email, and we will reply as soon as possible.