MEME 热电芯片 MEME Thermoelectric Chip

微纳热电转换技术 Micro/nano Thermoelectric Technology

微机电能源(MEME)热电芯片凭借创新的纳米构建材料与微纳机电系统设计,实现了高效能量转换,能为工业余热发电、环境热能利用、物联网设备、可穿戴产品及工业传感器等场景,提供可持续的绿色能源解决方案。

Microelectromechanical energy (MEME) thermoelectric chips achieve efficient energy conversion through innovative nanostructured materials and micro-nanoelectromechanical system design. They can provide sustainable green energy solutions for scenarios such as industrial waste heat power generation, environmental thermal energy utilization, IoT devices, wearable products, and industrial sensors.

基础理论、装备制造、材料制备、器件制备与系统应用创新

Innovations in theory, equipment, material, fabrication and applications

理论创新:热的尺度效应

Theoretical Innovation: Scale Effects of Heat

纳米构建:高效热电材料

Nano-structuring: High-Efficiency Thermoelectric Materials

微纳制造:规模化大批量

Micro/Nano-Fabrication: Large-Scale Production

技术突破:微小温差发电

Technological Breakthrough: Micro-Thermoelectric Power Generation

精密传感:新一代传感器

Precision Sensing: Next-Generation Sensors

绿色能源:微纳能源革命

Green Energy: The Micro-Nano Energy Revolution

MEME热电芯片产品图

核心技术 Technology

MEME 热电芯片将革命性的纳米材料与先进的微纳制造工艺相结合,实现前所未有的能量转换效率。

MEME 热电芯片基于热电效应与纳米尺度调控。通过微机加工工艺在芯片上集成数万对热电对,即使在极小温差下也能高效将热能转化为电能。

  • 塞贝克效应 (Seebeck effect): 温差产生电压,实现能量采集。
  • 珀尔帖效应 (Peltier effect): 电流驱动吸热/放热,用于芯片级制冷。
  • 尺度效应理论 (Scale Effects of Heat): 在纳米结构中,尺度效应使热与电的输运得以部分解耦,从而实现降低热导率并提升功率因子的协同优化。

MEME 芯片具备超高灵敏度、低能耗、可集成等特性,成为新一代能源、传感与热管理核心技术。

The MEME Thermoelectric Chip combines thermoelectric effects with nanoscale engineering. Tens of thousands of thermoelectric pairs are integrated on a single chip, enabling efficient energy conversion even from tiny temperature differences.

  • Seebeck effect: Converts temperature gradients into electrical power.
  • Peltier effect: Generates localized heating or cooling at the chip level.
  • Scale Effects of Heat: In nanostructures, scale effects enable partial decoupling of thermal and electrical transport, thereby reducing thermal conductivity while enhancing the power factor.

MEME chips, featuring ultra-high sensitivity, low energy consumption, and seamless integrability, are emerging as a core technology for next-generation energy, sensing, and thermal management applications.

核心技术示意图

国际大奖 International Recognition

MEME 热电芯片的创新技术已在全球范围内获得多项殊荣。

R&D 100 奖项图片

“R&D 100” 2024年度可持续创新者奖

被誉为科技创新界的“奥斯卡奖”与工程领域的“诺贝尔奖”

2024 R&D 100 Sustainability Innovator of the Year (Known as the "Oscars" of technological innovation)

硅谷发明节金奖图片

2024年美国硅谷发明节金奖

Gold Medal, the 2024 Silicon Valley Innovation and Invention Festival, USA

瑞士日内瓦发明展银奖图片

2024年瑞士日内瓦第49届发明展银奖

Silver Medal, the 49th Salon International des Inventions de Genève, Switzerland

产品应用 Applications

MEME 热电芯片广泛应用于芯片级制冷、高精度传感和微小温差发电等多个前沿领域。

芯片级制冷

可与CMOS芯片键合实现600K/mm芯片级制冷,有效降低芯片热点温度。

It can be bonded with CMOS chips to achieve 600K/mm chip-level cooling, effectively reducing the chip hotspot temperature.

芯片级制冷应用图

高精度传感

平面阵列高精度温差传感器,可实现0.001K的超高灵敏度。

Planar array high-precision temperature difference sensor: 0.001K sensitivity.

高精度传感应用图1

高端分析测试设备所用温度传感器

Temperature sensors used in high-end analytical and testing equipment

高精度传感应用图2

识别颜色与材料

Identifying colors and materials

高精度传感应用图3

量化测量图像与声音

Quantitative measurement of images and sounds

高精度传感应用图4

人体与机器人可穿戴传感器

Wearable sensors for humans and robots

微小温差发电

高效微小温差发电,打破低品位热能利用瓶颈,实现全场景热能向绿色能源的高效转化。

High-efficiency small temperature difference power generation breaks the bottleneck of low-grade thermal energy utilization and realizes efficient conversion of thermal energy into green energy in all scenarios.

微小温差发电应用图1
微小温差发电应用图2

联系我们 Contact Us

期待与您合作,共同探索热电转换的无限可能。 We look forward to collaborating with you to explore the infinite possibilities of thermoelectric conversion.

metaet2025@metaenergytech.com

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